Torsion beam accelerometer with slotted tilt plate

Details Torsion beam accelerometer with slotted tilt plate Torsion beam accelerometer with slotted tilt plate

G - Physics

01

P

G01P 15/125 (2006.01)

Patent

CA 2165488

A capacitive-type torsion beam accelerometer sensor element exhibiting improved stability contains slots in the heavy side of the rotatable sensing element which serve to alter the geometry of the heavy side capacitor such that the electrical geometry substantially coincides with the physical geometry of the substrate's fixed conductive plate in the presence of charge spreading. The slots also permit ingress and egress of air, thus extending the frequency response.

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