Transducer with surface acoustic waves with low gap

H - Electricity – 03 – H

Patent

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H03H 9/145 (2006.01)

Patent

CA 2333772

The invention concerns a transducer with surface acoustic waves, said to have low gap, having a free surface between consecutive electrodes, thereby capable of operating at very high frequency (of the order of several Giga Hertz). The invention is characterised in that said transducer further comprises an array of etchings separated by mesa in the substrate. Said array is covered with a metal coating, constituting the electrodes, thereby enabling to obtain the transducer directly. The invention is applicable to surface acoustic wave filter.

L'invention concerne un transducteur à ondes acoustiques de surface dit à faible gap, qui présente une surface libre entre électrodes consécutives très faible, pouvant ainsi fonctionner à très haute fréquence (de l'ordre de plusieurs Giga Hertz). Le transducteur de l'invention comprend en outre un réseau de gravures séparées par des mesa dans le substrat. Ce réseau est recouvert d'une couche de métallisation, constitutive des électrodes, ce qui permet d'obtenir le transducteur de manière directe. Application: filtre à ondes acoustiques de surface.

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