H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/00 (2006.01) H01L 21/687 (2006.01)
Patent
CA 2469475
An electrically conductive transfer member for transferring precision equipment materials such as silicon wafers for semiconductors and glass substrates for liquid crystal display devices, as well as the method of manufacturing the transfer member. The transfer member has a carbon fiber reinforced composite material body with an electroconductive polymer part connected to at least some of the carbon fibers of the body. The electroconductive transfer member removes static electricity of the components transferred by the transfer member.
L'invention concerne un élément de transfert conducteur électriquement conçu pour transférer des matériaux d'équipement de précision tels que des plaquettes de silicium pour des substrats semi-conducteurs et des substrats de verre pour des dispositifs d'affichage à cristaux liquides, ainsi que le procédé de fabrication dudit élément de transfert. Ledit élément de transfert présente un corps en matériau composite renforcé de fibre de carbone doté d'une partie polymère électroconductrice, cette dernière étant connectée à au moins une des fibres de carbone dudit corps. Ledit élément de transfert électroconducteur supprime l'électricité statique desdits composants transférés par ledit élément de transfert.
Aoyagi Kenichi
Kobayashi Takashi
Miller Chris L.
Sakai Shuji
Uchida Daisuke
E.i. Du Pont de Nemours And Company
Ishihara Chemical Company Ltd.
Nippon Oil Corporation
Torys Llp
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