Translational accelerometer and accelerometer assembly method

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G01P 15/08 (2006.01) G01P 15/097 (2006.01) G01P 15/10 (2006.01)

Patent

CA 1296543

-27- TRANSLATIONAL ACCELEROMETER AND ACCELEROMETER ASSEMBLY METHOD Abstract An accelerometer comprising a body (10, 16, 12), a proof mass (18, 30, 32), mounting means comprising flexures (20, 22) for mounting the proof massto the body, and force sensing means (34, 38). The flexures permit translationalmotion of the proof mass with respect to the body along a sensitive axis SA and rotation of the proof mass with respect to the body about a hinge axis HA that is perpendicular to the sensitive axis. Acceleration of the accelerometer along thesensitive axis results in translational motion of the proof mass along the sensitive axis. The force sensing means reacts to such translational motion by producing asignal indicative of acceleration along the sensitive axis. In a preferred embodiment, the mounting means comprises a pair of fused quartz flexures that are oppositely directed with respect to one another, and the sensing means comprises a pair of vibrating beam force transducers that are connected to the proof mass on opposite sides of the binge axis from one another. The described assembly method for accelerometers comprises forming bridges between the proof mass and body, the bridges being removed after attachment of the force transducers.

540648

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