Transparent electrically conductive layer, electrically...

Details Transparent electrically conductive layer, electrically... Transparent electrically conductive layer, electrically...

G - Physics

02

F

G02F 1/155 (2006.01) C01G 11/00 (2006.01) C23C 14/08 (2006.01) C23C 14/34 (2006.01) G02F 1/153 (2006.01) H01B 1/08 (2006.01) H01L 23/14 (2006.01)

Patent

CA 2150724

A transparent electrically conductive layer having practically sufficient electrical conductivity and light transmittance and having excellent resistance to moist heat and etching properties, and an electrically conductive transparent substrate utilizing the transparent electrically conductive layer, the transparent electrically conductive layer being formed of a substantially amorphous oxide containing indium (In) and zinc (Zn) as main cation components or a substantially amorphous oxide containing indium (In), zinc (Zn) and at least one other third element having a valence of at least 3, in which the atomic ratio of In, In/(In + Zn), is 0.50 to 0.90 or the atomic ratio of the total amount of the third element(s), (total third element)/(In + Zn + total third element(s)), when at least one other third element is contained, is 0.2 or less. -155-

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