B - Operations – Transporting – 65 – G
Patent
B - Operations, Transporting
65
G
B65G 49/07 (2006.01) B65G 25/02 (2006.01) B65G 25/06 (2006.01) H01L 21/68 (2006.01) F27B 9/24 (2006.01) H01L 21/677 (2006.01)
Patent
CA 2380261
The present invention relates to a transport device for transporting to-be-processed elements through a high-temperature zone and a corresponding method. The transport device operates according to the walking beam principle, with thin, elongated carrier elements made of a flexible material, which are maintained under tensile stress along the longitudinal axis of the carrier elements, being provided instead of conventional walking beams. The proposed transport device permits low contamination transport of the elements through a high-temperature zone and improved utilization of energy as well as the ability to use a RTP process.
La présente invention concerne un dispositif de transport et une méthode associée permettant de déplacer des articles à traiter à travers une zone de haute température. Le dispositif de transport fonctionne selon le principe de la tringle d'asservissement, mais à la différence de cette tringle, il comporte des éléments porteurs minces et allongés qui sont maintenus sous tension le long de l'axe longitudinal du dispositif de transport. Le dispositif de transport proposé permet un déplacement de faible contamination à travers une zone de haute température, il fait une meilleure utilisation de l'énergie et il peut servir dans un processus de traitement thermique rapide.
Biro Daniel
Lenz Reinhard
Volk Peter
Wandel Gernot
Centrotherm Elektrische Anlagen Gmbh Und Co. Kg.
Centrotherm Photovoltaics Ag
Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung
Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forshung E
Long And Cameron
LandOfFree
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