Transport device for the transfer of a workpiece carrier

Details Transport device for the transfer of a workpiece carrier Transport device for the transfer of a workpiece carrier

B - Operations, Transporting

65

G

B65G 49/02 (2006.01) B65G 49/04 (2006.01) H01L 21/00 (2006.01) H01L 21/68 (2006.01)

Patent

CA 2054164

ABSTRACT OF THE DISCLOSURE A transport device for the transfer of a workpiece carrier from a container for a first bath to a container for a second bath has a vertical sliding carriage. To this vertical sliding carriage at least one pivot arm is arranged, which carries the workpiece carrier to be transferred. The pivot range of the workpiece carrier is located exclusively below the pivot axis. By means of that a miminum possible transfer time is achieved.

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