H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/187
H01L 21/68 (2006.01) B65G 51/02 (2006.01) B65G 51/03 (2006.01) H01L 21/677 (2006.01)
Patent
CA 1049158
TRANSPORT SYSTEM FOR SEMICONDUCTOR WAFER MULTIPROCESSING STATION SYSTEM ABSTRACT The teaching discloses a dual bidirectional minimum volume self-centering air tract system for transporting semiconductor wafers or geometrically similar parts-in- process to and from processing tool stations in a random type manner and embodying controls to identify and collect of the fluid within and utilized by the transport system while supplying and receiving wafers to processing tool stations which may have a wide variation of ambient conditions. Further said transport system embodies among other features means for bidirectional travel with cross over intersections, directional control means, buffer sections and fluid vector means from a lower plenum for maintaining wafers centered on a fluidic cushion track so as to avoid edge contact of the wafer against any part of the apparatus and minimal backside or back flat face contact with the track membrane. The system also provides a means for sending wafers into the system and collecting processed pieces in suitable containers in lot or random form. - 1 -
262458
Babinski John P.
Bertelsen Bruce I.
Raacke Karl H.
Sirgo Valdeko H.
Townsend Clarence J.
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