Transport system for wafer processing line

Details Transport system for wafer processing line Transport system for wafer processing line

H - Electricity

01

L

H01L 21/00 (2006.01) B65G 49/07 (2006.01) H01L 21/677 (2006.01)

Patent

CA 2137471

A wafer processing system includes a plurality of evacuable housings connected in series to form a processing line, with a plurality of isolation valves to separately isolate the housings. A track extends through the connected housings. At least one wafer carrier is moveable on the track, through the housings and along the processing line. The wafer carrier holds wafers in vertical or- ientation and also includes a plurality of magnets aligned along its bottom. Outside the housings, a plurality of magnetic drive units are aligned parallel with the track, with one drive unit per housing. Each drive unit includes a motor driven conveyor with a plurality of magnets mounted thereon which imposes magnetic fields inside the housing to magnetically couple with the magnets mounted on the carrier. When the motor driven conveyor moves the imposed magnetic fields, the magnetic coupling causes the wafer carrier to move. A controller operatively connected to the isolation valves and the drive units coordinates movement of waf- er carriers along the processing line according to a predetermined sequence while maintaining vacuum conditions in the hous- ings.

Affiliated with

Also associated with

Rating

Transport system for wafer processing line does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Transport system for wafer processing line, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Transport system for wafer processing line will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1667921