Treatment method in glow-discharge plasma and apparatus thereof

Details Treatment method in glow-discharge plasma and apparatus thereof Treatment method in glow-discharge plasma and apparatus thereof

H - Electricity

05

H

H05H 1/46 (2006.01) B01J 19/08 (2006.01) H01J 37/32 (2006.01)

Patent

CA 2205817

In a glow-discharge plasma treatment, a substrate is disposed between two opposing electrodes, at least one electrode being covered by a solid dielectric at an opposing surface. An electric field is imposed between the electrodes in an atmospheric pressure. The electric field is pulse modulated such that an onset time, prefeably an offset time as well, of a pulse is less than 100 µs, and field intensity is 1 to 100 kV/cm. Thus, a stable and evenly dispersed discharge-plasma is obtained, which can treat an outer surface of the substrate.

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