Treatment of reaction gases by radio frequency plasma

Details Treatment of reaction gases by radio frequency plasma Treatment of reaction gases by radio frequency plasma

B - Operations, Transporting

01

J

204/180, 204/96

B01J 19/08 (2006.01) B01J 12/00 (2006.01) C23C 16/44 (2006.01) C23C 16/50 (2006.01)

Patent

CA 1282732

TREATMENT OF REACTION GASES BY RADIO FREQUENCY PLASMA Abstract of the Disclosure Reaction gas or gases from a reaction chamber are fed through a post-reaction chamber. An RF plasma is formed in the post- reaction chamber and the reaction gas or gases pass through the plasma. Residual products are deposited on an internal surface, or surfaces, in the post-reaction chamber. The post-reaction chamber is preferably positioned before the vacuum pump extracting the gas or gases from the reaction chamber. -i-

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