Trench isolation

Details Trench isolation Trench isolation

H - Electricity

01

L

H01L 21/76 (2006.01) H01L 21/763 (2006.01) H01L 29/06 (2006.01)

Patent

CA 2285273

An island (7) of material is provided with insulating means comprising a trench structure wherein the trench structure comprises a first insulating trench (4) surrounded by a second insulating trench (4') and said trenches are joined together by at least two transverse linking trenches (9).

L'invention concerne un îlot (7) de matière, pourvu d'organes d'isolement. Cet îlot comprend une structure en tranchées, laquelle comprend une première tranchée d'isolement (4), entourée d'une seconde tranchée d'isolement (4'), ces tranchées étant reliées l'une à l'autre par au moins deux tranchées de liaison transversales (9).

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