Tunable cvd diamond structures

Details Tunable cvd diamond structures Tunable cvd diamond structures

C - Chemistry, Metallurgy

30

B

C30B 25/00 (2006.01) C30B 25/02 (2006.01) C30B 29/04 (2006.01)

Patent

CA 2511670

Monocrystalline diamond, adapted for use as in applications such as semiconductor devices, optical waveguides, and industrial applications, in the form of a single crystalline diamond structure having one or more diamond layers, at least one of which is formed by a CVD process. The diamond layers are "lattice-matched" or "lattice-mismatched" to each other to provide a desired level of strain.

L'invention concerne un diamant monocristallin conçu pour être utilisé dans des applications telles que des dispositifs à semi-conducteurs, des guides d'ondes optiques ainsi que des applications industrielles, et présentant une structure comprenant une ou plusieurs couches de diamant, au moins une de ces couches étant constituée au moyen d'un procédé de dépôt chimique en phase vapeur (CVD). Les couches de diamant peuvent être formées de façon que leurs réseaux moléculaires soient appariés ou non, ce qui permet d'obtenir le degré de tension souhaité.

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