Tunable optical device

Details Tunable optical device Tunable optical device

G - Physics

02

F

G02F 1/1333 (2006.01) G02F 1/1339 (2006.01) G02F 1/1337 (2006.01)

Patent

CA 2310811

A method of fabricating a tunable optical device, and a device fabricated according to the method, where the tuning means include a liquid crystal material (5) in an enclosed cavity (3) fabricated over an optical element (1), typically a waveguide, and the cavity is created by the removal, through selective etching, of a layer of quaternary indium gallium arsenide phosphide (18) through a slot (8) etched in a layer of indium phosphide (4) formed over the quaternary layer.

L'invention concerne un procédé de fabrication d'un dispositif optique accordable et un dispositif fabriqué selon ce procédé, le dispositif d'accord comprenant une matière à cristaux liquides (5) dans une cavité fermée (3) disposée au-dessus d'un élément optique (1), en général un guide d'onde; on crée la cavité en retirant, par attaque sélective, une couche d'indium gallium arséniure phosphure quaternaire (18) par une fente (8) réalisée par attaque dans une couche de phosphure d'indium (4) formée au-dessus de la couche quaternaire.

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