G - Physics – 02 – F
Patent
G - Physics
02
F
G02F 1/01 (2006.01)
Patent
CA 2540184
An optical device including: a glass substrate (410); a crystalline silicon layer (402) bonded to the glass substrate; and a thermally tunable thin-film optical filter (420) fabricated on top of the crystalline silicon layer.
L'invention concerne un dispositif optique comprenant un substrat en verre (410); une couche de silicium cristallin (402) reliée au substrat en verre; et un filtre optique à pellicule mince thermiquement accordable (420) ménagé par dessus la couche de silicium cristallin.
Cohen Mitchell S.
Ma Eugene Yi-Shan
Aegis Semiconductor Inc.
Smart & Biggar
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