Tunable optical filter with heater on a cte-matched...

G - Physics – 02 – F

Patent

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G02F 1/01 (2006.01)

Patent

CA 2540184

An optical device including: a glass substrate (410); a crystalline silicon layer (402) bonded to the glass substrate; and a thermally tunable thin-film optical filter (420) fabricated on top of the crystalline silicon layer.

L'invention concerne un dispositif optique comprenant un substrat en verre (410); une couche de silicium cristallin (402) reliée au substrat en verre; et un filtre optique à pellicule mince thermiquement accordable (420) ménagé par dessus la couche de silicium cristallin.

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