Turbo-molecular blower

Details Turbo-molecular blower Turbo-molecular blower

F - Mech Eng,Light,Heat,Weapons

04

D

F04D 19/04 (2006.01)

Patent

CA 2158924

The turbo-molecular pump (14) of the pres- ent invention comprises, basically, a series of ax- ial, rotating high speed rotor disks (20) being in- terleaved with stationary rotor blades (24). The ro- tor shaft (26) is mounted in the blower housing (58) by means of a ferrofluidic rotating seal (28) which prevents contamination and provides vacu- um integrity. Because of the high molecular weight gases and the velocities needed of such, an external multi-horsepower motor drives the blow- er. External cooling is further provided to reduce heat generated by the blower. Due to the high torque available, pressures from 0.1 to 100 torr are possible with high density gases and at high flow velocities.

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