Turbo-molecular pump having improved rotor and stator...

Details Turbo-molecular pump having improved rotor and stator... Turbo-molecular pump having improved rotor and stator...

F - Mech Eng,Light,Heat,Weapons

04

D

230/127

F04D 19/04 (2006.01) F04B 19/16 (2006.01) F04D 17/08 (2006.01)

Patent

CA 954487

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