F - Mech Eng,Light,Heat,Weapons – 04 – B
Patent
F - Mech Eng,Light,Heat,Weapons
04
B
103/32
F04B 43/04 (2006.01) F04B 43/00 (2006.01) F04B 53/10 (2006.01) A61M 5/142 (2006.01)
Patent
CA 2033181
Pumping takes place within the micropump as a result of the deformation of a plate (12) using a piezoelectric pad (13). The deformation produces a variation in volume within a pumping chamber (15) defined inside a plate (11) which is made of a material which can be machined using photolithographic processes. The pump outlet (3) is blocked off, selectively, by a membraned check-valve (18) which is in direct communication with another check-valve (16) via the pumping chamber. The check-valve (16) selectively enables the pumping chamber to communicate with the pump inlet (2). The outlet valve membrane (18) has a layer of oxide (17) providing a pretension on closing. The check-valve thus has a regulatory effect on the pump operation, making the flow almost independent of the outlet (3) pressure.
Debiotech S.a.
Gowling Lafleur Henderson Llp
LandOfFree
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