Ultracleaning of involuted microparts

B - Operations – Transporting – 08 – B

Patent

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B08B 3/12 (2006.01) B08B 3/08 (2006.01)

Patent

CA 2120325

2120325 9306949 PCTABS00021 A method for cleaning a component having a complex configuration utilizing a surfactant wash and sonic cavitation followed by drying with an organic solvent or vapor is disclosed. An apparatus containing an enclosure (12) for holding the object to be cleaned, means (14) for holding the object in place within the enclosure, at least one port (22) for passing treatment fluids through the enclosure, and a sonic generator (16) adjacent to the enclosure is used for carrying out the method. In a preferred embodiment, the apparatus contains a port (76) or valve (78) for allowing hot organic vapor to enter the chamber, and a means for pressurizing the enclosure to a superatmospheric pressure.

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