Ultrahigh purity silane and silicon production with recycle...

Details Ultrahigh purity silane and silicon production with recycle... Ultrahigh purity silane and silicon production with recycle...

C - Chemistry, Metallurgy

01

B

23/196

C01B 33/04 (2006.01)

Patent

CA 1184017

12820 ULTRAHIGH PURITY SILANE AND SILICON PRODUCTION WITH RECYCLE OF SILANE PRODUCTS Abstract of the Disclosure Tri-and dichlorosilanes formed by the reaction of metallurgical silicon, hydrogen and silicon tetrachloride are passed as feedstock through a feed stripper column wherein light wastes, e.g., components lighter than dichlorosilane are rejected, and thereafter subjected to disproportionation in the presence of an ion exchange resin to form high purity silane product and unreacted and by-product materials. A small portion of the silane product is recycled to the feed stripper column which results in the reaction of silane with chloride impurities in the feedstock which forms volatile hydrides which are rejected as light waste in the feed stripper column. S P E C I F I C A T I O N -1-

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