Use of desiccant to control edge fusion in dry film photoresist

Details Use of desiccant to control edge fusion in dry film photoresist Use of desiccant to control edge fusion in dry film photoresist

G - Physics

03

C

96/215, 95/95

G03C 3/00 (2006.01) G03B 17/26 (2006.01)

Patent

CA 1287248

PATENT ROACH CASE 1 USE OF DESICCANT TO CONTROL EDGE FUSION IN DRY FILM PHOTORESIST Abstract of Disclosure Disclosed is a method for controlling edge fusion in a laminate of an aqueous developable photoresist composition sandwiched between a film support and a protective cover sheet comprising maintaining the relative humidity below about 20% in the environment surrounding the laminate, pre- ferentially achieved by packaging the photoresist with a des- iccant in a moisture proof container.

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