Use of perfluoropolyethers in mechanical pumps

Details Use of perfluoropolyethers in mechanical pumps Use of perfluoropolyethers in mechanical pumps

C - Chemistry, Metallurgy

10

M

253/136

C10M 107/32 (2006.01) C10M 107/38 (2006.01) F04C 29/02 (2006.01)

Patent

CA 1275091

"USE OF PERFLUOROPOLYETHERS IN MECHANICAL PUMPS" ABSTRACT OF THE DISCLOSURE A process for the generation of vacuums ? 5.10-4 torr by means of mechanical pumps, comprising using s operative fluid a perfluoropolyether having neutral end groups and contai= ning light products having an average molecular weight equal to or lower than 1,000, in amount lower than or equal to 50 ppm. * * * * * * * *

523127

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