V-groove charge-coupled device

Details V-groove charge-coupled device V-groove charge-coupled device

G - Physics

11

C

352/82.2

G11C 11/40 (2006.01) H01L 29/10 (2006.01) H01L 29/768 (2006.01)

Patent

CA 1130458

ABSTRACT V-GROOVE CHARGE-COUPLED DEVICE A charge-coupled device shift register is formed in V-grooves provided by anisotropically etching in a substrate. Insulated conductive electrodes are provided perpendicular to the V-grooves to form a plurality of parallel shift registers which transfer charges along the length of the V-grooves. BU-9-78-011

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