H - Electricity – 01 – J
Patent
H - Electricity
01
J
H01J 37/32 (2006.01) C23C 16/04 (2006.01) C23C 16/50 (2006.01)
Patent
CA 2388335
The invention relates to a device for treating a receptacle (30) with a low pressure plasma, comprising at least one treatment station (14) consisting of a fixed cavity (32) which is connected by a vacuum circuit (74) to a depressurizing source, and wherein said treatment station (14) consists of a moveable cover (34) provided with means for supporting (54) the receptacle (30) in such a way that the receptacle in introduced into the cavity (32) by displacing the cover (34). The invention is characterized in that the cover (34) comprises a connecting channel (64) which enables the cavity (32) to communicate with a fixed end (69) of the vacuum circuit when the cover (34) is in a position in which the cavity is hermetically sealed.
L'invention propose un dispositif pour le traitement d'un récipient (30) à l'aide d'un plasma à basse pression, du type comportant au moins un poste de traitement (14) comprenant une cavité fixe (32) reliée à une source de dépression par l'intermédiaire d'un circuit de vide (74), et du type dans lequel le poste de traitement (14) comporte un couvercle mobile (34) muni de moyens de support (54) du récipient (30) de sorte que l'introduction du récipient dans la cavité (32) soit assurée par déplacement du couvercle (34), caractérisé en ce que le couvercle (34) comporte un canal de liaison (64) qui, lorsque le couvercle (34) est en position de fermeture étanche de la cavité (32), met en communication la cavité (32) avec une extrémité fixe (68) du circuit de vide (74).
Goudreau Gage Dubuc
Sidel Actis Services
LandOfFree
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