Vacuum compatible linear motion device

Details Vacuum compatible linear motion device Vacuum compatible linear motion device

H - Electricity

01

J

H01J 37/20 (2006.01) F16C 29/02 (2006.01) G03F 7/20 (2006.01)

Patent

CA 2244994

A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus esentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.

Un dispositif à déplacement linéaire compatible avec le vide ayant un palier fluide est placé dans une chambre à vide ayant une pression d'utilisation de sensiblement moins d'une atmosphère. Le palier fluide est placé dans une enceinte sous vide située à l'intérieur de la chambre à vide et est maintenu à une pression supérieure à celle de la chambre à vide et inférieure à une atmosphère, ce qui permet d'isoler essentiellement le palier fluide. Une charge utile mobile est accouplée au dispositif à déplacement linéaire de sorte qu'elle se déplace linéairement dans le sens de l'axe long du dispositif.

Affiliated with

Also associated with

Rating

Vacuum compatible linear motion device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vacuum compatible linear motion device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vacuum compatible linear motion device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1644419