Vacuum monitoring

Details Vacuum monitoring Vacuum monitoring

G - Physics

01

N

316/2, 73/3, 324

G01N 27/00 (2006.01) G01L 9/00 (2006.01) G01L 9/12 (2006.01) G01M 3/16 (2006.01)

Patent

CA 1046582

Abstract of the Disclosure Monitoring of gas contamination and of related deviations in pressures within a sealed cavity is effected by way of electrical-network responses to conduction charac- teristics of a thin-film deposit of getter material within the cavity, the getter film being deposited upon inert insulation between conductive contacts externally connected into an electrical circuit which controls related output signalling in accordance with conductance changes caused by getter material reactions with gas within the cavity.

265718

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