F - Mech Eng,Light,Heat,Weapons – 04 – D
Patent
F - Mech Eng,Light,Heat,Weapons
04
D
F04D 19/04 (2006.01) F04D 17/16 (2006.01) F04D 29/04 (2006.01) F04D 29/66 (2006.01)
Patent
CA 2610255
A turbomolecular vacuum pump (54) comprises a housing (70) and a rotor (52) supported by a bearing arrangement (64) for rotation relative to the housing (70). The bearing arrangement (64) comprises a bearing (72, 74, 76, 78) supported in both radial and axial directions by a resilient support (80) comprising inner (86) and outer (88) annular portions connected by a plurality of flexible members (84), the resilient support (80) having a radial stiffness in the range from 50 to 500 N/mm.
L'invention a pour objet une pompe à vide turbomoléculaire (54) comprenant un carter (70) et un rotor (52) soutenu par un système de palier (64) pour une rotation par rapport au carter (70). Le système de palier (64) comprend un palier (72, 74, 76, 78) soutenu dans le sens radial comme dans le sens axial par un support souple (80) comprenant des parties annulaires interne (86) et externe (88) raccordées par une pluralité d'éléments flexibles (84), le support souple (80) présentant une rigidité radiale allant de 50 à 500 N/mm.
Brewster Barrie Dudley
Siew Chan-Cheong
Edwards Limited
Gowling Lafleur Henderson Llp
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