Vacuum pump

F - Mech Eng,Light,Heat,Weapons – 04 – D

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F04D 19/04 (2006.01)

Patent

CA 2593811

A vacuum pump comprises a first pumping section (106), and, downstream therefrom, a second pumping section (108). The pump comprises a first pump inlet (120) through which fluid can enter the pump and pass through both the first and second pumping sections towards a pump outlet, and a second pump inlet (122) through which fluid can enter the pump and pass through only the second pumping section towards the outlet. The second pumping section (108) comprises at least one turbo-molecular pumping stage (109a, 109b) and, downstream therefrom, an externally threaded rotor (109c).

Pompe à vide comportant une première section de pompage (106), et, en aval de celle-ci, une deuxième section de pompage (108). La pompe comporte une première entrée de pompe (120) par laquelle le fluide peut entrer dans la pompe et passer à travers les première et deuxième sections de pompage vers une sortie de pompe, et une deuxième entrée de pompe (122) par laquelle le fluide peut entrer dans la pompe et passer uniquement à travers la deuxième section de pompage vers la sortie. La deuxième section de pompage (108) comporte au moins un étage de pompage turbo-moléculaire (109a, 109b) et, en aval de celui-ci, un rotor fileté extérieurement (109c).

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