Vacuum pumps

Details Vacuum pumps Vacuum pumps

F - Mech Eng,Light,Heat,Weapons

04

D

230/127

F04D 21/00 (2006.01) F04D 19/04 (2006.01)

Patent

CA 1047464

VACUUM PUMP Abstract of the Disclosure An integral vacuum pump for producing ultra-high vacuums including, in combination, axial turbomolecular, centrifugal compressor and vortex diode pumping means.

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