Vacuum vapor deposition system

Details Vacuum vapor deposition system Vacuum vapor deposition system

C - Chemistry, Metallurgy

23

C

32/24, 148/25

C23C 14/24 (2006.01)

Patent

CA 1221232

Title of Invention: VACUUM VAPOR DEPOSITION SYSTEM Abstract: The known vacuum vapor deposition system of the type that band steel is passed through a high-vacuum vapor deposi- tion chamber while being wound around a rotary cell, vapor of metal molten in a crucible provided within the chamber is guided by a hood to the surf ace of the rotary cell through a vapor deposition port of the hood opposed to the rotary cell, and within the chamber are provided arcuate covers which are connected to the hood on a band steel entrance side and on a band steel exit side, respectively, of the vapor deposition port as spaced slightly from the rotary cell so that the covers may not come into contact with the band steel wound around the rotary cell, is improved in that the vacuum vapor deposition system comprises means for heating the surface of the rotary cell up to a temperature equal to or higher than a reevaporation temperature of the metal under a vapor pres- sure of the vapor of the metal in the proximity of the rotary cell so that the metal may not be deposited onto the opposite end portions of the rotary cell around which the band steel is not wound, and means for heating the surfaces of the hood and the covers up to a temperature equal to or higher than a reevaporation temperature of the metal under a vapor pressure of the vapor of the metal in the proximity of the hood and the covers so that the metal may not be deposited onto the hood and the covers.

464064

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