F - Mech Eng,Light,Heat,Weapons – 16 – K
Patent
F - Mech Eng,Light,Heat,Weapons
16
K
F16K 49/00 (2006.01) F16K 51/02 (2006.01)
Patent
CA 2564259
The invention relates to a valve (1) used for vapor-tightly disconnecting two interconnected process units. Said valve (1) comprises a continuous duct (3) which connects the two vacuum evaporators that are individually provided with an outer vapor-proof jacket, and a blocking mechanism (12) mounted in the duct. The aim of the invention is to create a valve that allows two interconnected vacuum process chambers to be disconnected in a vapor-proof manner such that the functional reliability is improved. Said aim is achieved by providing the vapor-impinged surface of the valve duct with a vapor condensation-repellent zone which is connected in a thermally conducting manner to a heating apparatus (15) that is embodied so as to envelope the valve.
L'invention concerne une soupape pour le désaccouplement, étanche à la vapeur, de deux unités de processus reliées entre elles. La soupape selon l'invention comprend un conduit traversant (3) reliant les deux évaporateurs sous vide munis respectivement d'une enveloppe externe étanche à la vapeur, ainsi qu'un dispositif d'arrêt (12) monté dans le conduit. L'invention vise à fournir une soupape pour le désaccouplement, étanche à la vapeur, de deux chambres de processus sous vide reliées entre elles, dont la fiabilité de fonctionnement soit améliorée. A cet effet, la surface, sollicitée par la vapeur, du conduit de la soupape présente une zone qui refoule la condensation de vapeur et qui est reliée de manière thermoconductrice à un dispositif de chauffage (15) conçu pour envelopper la soupape.
Gottsmann Lutz
Jaeger Reinhard
Seyfert Ulf
Wenzel Bernd-Dieter
Gierczak Eugene J. A.
von Ardenne Anlagentechnik Gmbh
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