G - Physics – 05 – D
Patent
G - Physics
05
D
341/38.5
G05D 7/06 (2006.01) B01F 15/04 (2006.01) B01J 4/00 (2006.01) C03B 37/014 (2006.01) C23C 16/52 (2006.01) G01F 1/68 (2006.01)
Patent
CA 1171940
VAPOR MASS FLOW CONTROL SYSTEM Abstract A chemical vapor delivery system comprises a bubbler partially filled with liquid to be vaporized by passing a carrier gas stream through the liquid. To reduce error in supplying a continuous, uniform mass flow of vaporized liquid to a using system, the pressure in the bubbler is sensed and compared with a reference pressure to provide a signal representing a pressure differential which is used in a computation by a flow controller to control the flow of carrier gas. A similar temperature differential is assessed by the flow controller which also monitors the level of liquid in the bubbler to further refine the accuracy of supplying the uniform mass flow of vaporized liquid.
377928
Gowling Lafleur Henderson Llp
Schumacher (j. C.) Company
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