Vapor phase chemical infiltration process of a material into...

C - Chemistry – Metallurgy – 04 – B

Patent

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C04B 35/52 (2006.01) C04B 35/80 (2006.01) C04B 35/83 (2006.01) C04B 35/84 (2006.01) C23C 16/22 (2006.01)

Patent

CA 2175045

The substrate (10) is placed in an enclosure (12) and is heated so as to establish therein a temperature gradient such that the substrate has a higher temperature in portions that are remote from its exposed surfaces than at its exposed surfaces. A reaction gas constituting a precursor for the material to be infiltrated is admitted into the enclosure, with formation of the material being enhanced in those portions of the substrate that are at higher temperature. At the beginning of the infiltration process, and at least during the major portion thereof, substrate heating is controlled in such a manner as to maintain the temperature of its exposed surfaces at a value that is no greater than the minimum temperature for the reaction gas to deposit the material that is to be infiltrated, while portions of the substrate that are remote from its exposed surfaces are at a temperature that is greater than the minimum temperature for deposition.

Le substrat (10) est placé dans une enceinte (12) et chauffé en établissant au sein de celui-ci un gradient thermique de sorte que le substrat présente une température plus élevée dans des parties éloignées de ses surfaces exposées qu'au niveau de celles-ci. Une phase gazeuse réactionnelle précurseur du matériau à infiltrer est admise dans l'enceinte, la formation du matériau étant favorisée dans les parties du substrat de température plus élevée. Au début du processus d'infiltration et au moins pendant la plus grande partie de celui-ci, le chauffage du substrat est commandé de manière à maintenir la température de ses surfaces exposées à une valeur au plus égale à la température minimale de dépôt du matériau à infiltrer à partir de la phase gazeuse réactionnelle, tandis que les parties du substrat éloignées de ses surfaces exposées sont à une température supérieure à la température minimale de dépôt.

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