Versatile, overpressure proof, absolute pressure sensor

Details Versatile, overpressure proof, absolute pressure sensor Versatile, overpressure proof, absolute pressure sensor

G - Physics

01

L

354/28, 354/30,

G01L 9/00 (2006.01) G01L 11/00 (2006.01)

Patent

CA 2025074

A non membrane-based overpressure proof gas pressure microsensor. Since it is not a membrane-based microsensor but is based on an open microbridge sensor structure (Fig. 8); it is not subject to breakage caused by overpressure. A method is described to determine gas pressure from thermal conductivity, k, and volumetric specific heat, C pv.

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