Vertical boat and wafer support

Details Vertical boat and wafer support Vertical boat and wafer support

H - Electricity

01

L

H01L 21/22 (2006.01) C23C 16/458 (2006.01)

Patent

CA 2109654

ABSTRACT OF THE DISCLOSURE A vertical rack or boat assembly for supporting and carrying semi-conductor material wafers in a vertical diffusion furnace, the assembly being made up of rack or boat and wafer support rings which fit into the boat.

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