Vertical coplanar waveguide with tunable characteristic...

H - Electricity – 01 – P

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H01P 3/00 (2006.01) H01P 3/18 (2006.01)

Patent

CA 2757501

An on-chip vertical coplanar waveguide with tunable char-acteristic impedance, a design structure, and a method of making the same. An on-chip transmission line (60) includes a signal line (65), an upper ground line (70) spaced apart from and above the signal line, and a lower ground line (75) spaced apart from and below the signal line. The signal line, the upper ground line and the lower ground line are substantially ver-tically aligned in a dielectric material (80).

L'invention porte sur un guide d'onde coplanaire vertical sur puce avec impédance caractéristique accordable, sur une structure de conception et sur un procédé de fabrication de celui-ci. Une ligne de transmission sur puce (60) comprend une ligne de signal (65), une ligne de mise à la masse supérieure (70) espacée de la ligne de signal et au-dessus de celle-ci, et une ligne de mise à la masse inférieure (75) espacée de la ligne de signal et au-dessous de celle-ci. La ligne de signal, la ligne de mise à la masse supérieure et la ligne de mise à la masse inférieure sont alignées sensiblement verticalement dans un matériau diélectrique (80).

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