Vertically integrated photodetector-amplifier

Details Vertically integrated photodetector-amplifier Vertically integrated photodetector-amplifier

H - Electricity

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L

345/27

H01L 27/14 (2006.01) H01L 27/144 (2006.01) H01L 31/105 (2006.01)

Patent

CA 1287153

VERTICALLY INTEGRATED PHOTODETECTOR-AMPLIFIER Abstract Monolithically integrated optical detector-amplifiers are described in which the detector-amplifier structure has vertical integration, and the amplifier is made of recessed gate MISFETS. The structure is planar which permits very fine line photolithography.

563562

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