Very high speed integrated microelectronic tubes

H - Electricity – 01 – J

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313/1.4

H01J 21/10 (2006.01) H01J 1/304 (2006.01) H01J 17/48 (2006.01)

Patent

CA 1283946

ABSTRACT OF THE DISCLOSURE An array of microelectronic tubes is shown which includes a plate-like substrate upon which an array of sharp needle like cathode electrodes is located. Each tube in the srray includes an anode electrode spaced from the cathode electrode. The tubes each contain gas at a pressure of between about 1/100 and 1 atmosphere, and the spacingbetween the tip of the cathode electrodes and anode electrodes is equal to or less than about 0.5 µm. The tubes are operated at voltages such that the mean free path of electrons travelling in the gas between the cathode and anode electrodes is equal to or greater than the spacing between the tip of the cathode electrode and the associated anode electrode. Both diode and triode arrays are shown.

554213

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