G - Physics – 02 – B
Patent
G - Physics
02
B
G02B 7/182 (2006.01)
Patent
CA 2328201
A micromachined mirror scanning system having plural benders of morphs and support arms (14, 16) between a mirror surface (10) of silicon and a surrounding frame (12). Electrical energization of the morphs with a DC voltage under the control of a computer provides a large range of mirror orientations and positions and the devices occupy a small planar package. The devices of the invention are formed from a single wafer of silicon and have low response times and large scan angles.
L'invention concerne un système de balayage à miroir micro-usiné comprenant plusieurs cintreuses de morphes et des bras de support (14, 16) placés entre une surface de miroir (10) en silicium et un cadre environnant (12). L'énergisation électrique des morphes, pratiquée à l'aide d'une tension en courant continu commandée par un ordinateur, fournie une large gamme d'orientation et de positions de miroir, ce qui fait que les dispositifs occupent un ensemble plan restreint. L'invention porte sur des dispositifs formés à partir d'un seul disque de silicium et présentant des temps de réponse faibles et des grands angles de balayage.
Ridout & Maybee Llp
Trustees Of Boston University
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