F - Mech Eng,Light,Heat,Weapons – 26 – B
Patent
F - Mech Eng,Light,Heat,Weapons
26
B
F26B 5/04 (2006.01) C23C 16/44 (2006.01) H01L 21/00 (2006.01)
Patent
CA 2507961
Very low moisture o-rings are prepared by placing standard o-rings (16) under vacuum in an inert atmosphere for a period of time (18) sufficient to achieve a desired outgassing rate. Heat is not applied. While the o-rings are under vacuum, moisture is removed from the o-rings (20) via diffusion transport.
L'invention concerne des joints toriques à très faible teneur en humidité obtenus par mise en place de joints toriques standard sous vide dans une atmosphère inerte pendant une durée suffisante afin d'atteindre un taux de dégazage désiré, et ce, sans application de chaleur. L'humidité est éliminée des joints toriques par transport par diffusion alors que ceux-ci sont placés sous vide.
Atmel Corporation
Smart & Biggar
LandOfFree
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