Very smooth and flat polycrystalline alumina substrates from...

C - Chemistry – Metallurgy – 04 – B

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C04B 35/10 (2006.01) B24D 3/00 (2006.01) C04B 33/28 (2006.01) C04B 35/111 (2006.01) C04B 35/634 (2006.01)

Patent

CA 1272872

ABSTRACT OF THE DISCLOSURE This invention provides thin, flat, water-impervious polycrystalline ceramic bodies composed of at least 99.5 by weight alumina, predominantly in the alpha crystal form. These bodies have a density of at least 3.9Mg/m3, an average surface roughness of 44 nm or less, typically 40 nm or less. The properties of the finished ceramic bodies make them ideal substrates for highly reliable electronic components, especially for high temperature environments. Processes for obtaining such bodies by direct firing of slip cast tapes are also described.

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