Vialess integrated inductive elements for electromagnetic...

H - Electricity – 01 – L

Patent

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H01L 43/02 (2006.01) H01F 17/00 (2006.01)

Patent

CA 2279297

An inductor suitable for integration in VLSI circuits and devices is fabricated by means of a post foundry procedure involving the deposition and patterning of layers of conductor material (32), isolation material (34), core material (50), isolation material (52) and conductor material (54) to produce conductive coils (60, 62) wrapped around a magnetic core without the need for vias. The fabrication steps utilize a combination of microelectronic and micromachining technologies.

La présente invention a trait à un inducteur que l'on peut intégrer dans des circuits et des dispositifs VLSI. Cet inducteur est fabriqué selon un procédé postfonderie de dépôt et de formation de couches de matériau conducteur (32), de matériau isolant (34), de matériau noyau (50), de matériau isolant (52) et de matériau conducteur (54) de façon à produire des bobines conductrices (60, 62) enveloppées autour d'un noyau magnétique, sans qu'il y ait besoin de trous d'interconnexions. Les étapes de fabrication combinent les techniques du microusinage et de la microéléctronique.

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