Vibrating beam rotation sensor

Details Vibrating beam rotation sensor Vibrating beam rotation sensor

G - Physics

01

P

73/67

G01P 3/44 (2006.01) G01C 19/56 (2006.01)

Patent

CA 1169677

360-80-0290 Abstract: VIBRATING BEAM ROTATION SENSOR A rotation sensor having a vibrating cantilever beam is disclosed herein. The sensor comprises an integral signle crystal silicon cantilever beam and support structure, an oscillator circuit for generating an electrical signal vibrating the cantilever beam at or near its natural resonant frequency and a piezoresitive element formed at the base of the base of the vibrating beam. The piezoresistive element is only sensitive to the stresses induced in the beam due to the rotation of the beam about an axis parallel to its length.

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