Vibrating diaphragm fluid pressure sensor device

Details Vibrating diaphragm fluid pressure sensor device Vibrating diaphragm fluid pressure sensor device

G - Physics

01

L

73/3

G01L 7/08 (2006.01)

Patent

CA 1106638

Abstract A fluid pressure responsive transducer is disclosed of the kind having a thin flat vibrating diaphragm serving as a wall of a continuous pres- sure chamber for converting a variable fluid pressure magnitude directly into a variable frequency electrical signal. The thin flat diaphragm, secured only at its periphery to the chamber, becomes progressively stiffer as it is pro- gressively deformed by fluid pressure loading more and more from its flat or unstressed position. A dual cavity configuration of the pressure chamber is formed by a rigid divider wall with a restricted passage therethrough. The effects of disturbing acoustic waves which might otherwise be generated in- terior of the fluid chamber or within pneumatic lines coupled thereto are thus suppressed.

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