Vibrating micromechanical sensor of angular velocity

Details Vibrating micromechanical sensor of angular velocity Vibrating micromechanical sensor of angular velocity

G - Physics

01

P

G01P 3/02 (2006.01) G01C 19/56 (2006.01) G01P 15/097 (2006.01)

Patent

CA 2700565

The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (1), (2), (3), (4), (22), (24) in such a way, that the coupling from one mode of motion to another, conveyed by the spring (1), (2), (3), (4), (22), (24), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical so-lutions for sensors of angular velocity.

La présente invention concerne des dispositifs de mesure devant être utilisés dans la mesure d'une vitesse angulaire et, plus particulièrement, des capteurs micromécaniques vibrants de vitesse angulaire. Dans un capteur de vitesse angulaire selon l'invention, une masse est supportée sur le cadre du composant de détection au moyen d'une structure à ressort asymétrique (1), (2), (3), (4), (22), (24) de telle sorte que le couplage d'un mode de mouvement à un autre, transporté par le ressort (1), (2), (3), (4), (22), (24), annule ou soulage le couplage entraîné par la non-idéalité due à l'asymétrie des ressorts ou de leur support. La structure du capteur de vitesse angulaire selon l'invention permet une mesure fiable montrant une bonne performance, en particulier dans des petites solutions micromécaniques vibrantes pour les capteurs de vitesse angulaire.

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