Vibrating type transducer and manufacturing process thereof

Details Vibrating type transducer and manufacturing process thereof Vibrating type transducer and manufacturing process thereof

H - Electricity

04

R

356/197, 73/69

H04R 23/00 (2006.01) G01H 11/06 (2006.01) G01H 13/00 (2006.01) G01L 9/00 (2006.01) H04R 31/00 (2006.01)

Patent

CA 1318521

ABSTRACT OF THE DISCLOSURE This invention relates to a vibrating type transducer wherein an H-shaped vibrator formed in- tegrally with a silicon substrate and having a hol- low chamber provided around is kept self-oscillating on its natural frequency together with an amplifier, a physical quantity such as force, pressure, differ- ential pressure or the like which is applied to the silicon substrate is detected from a change in the natural frequency arising on the vibrator correspond- ingly to such physical quantity, a process for man- ufacturing such vibrating type transducer through a semiconductor technique, a process for keeping the hollow chamber vacuum internally, a construction for giving an initial tension to the vibrator, and a con- struction of the amplifier operating for self-oscil- lation stably.

596951

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