Vibration sensor

G - Physics – 01 – H

Patent

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Details

G01H 11/06 (2006.01)

Patent

CA 2529136

A vibration sensor which can output a change in capacitance between a fixed electrode and a vibration electrode (3) opposed to the fixed electrode as a vibration signal, wherein the vibration electrode (3) is in the form of the same plate member formed with slits (3a), a vibration film (3b) in the middle which makes a vibration displacement solely by its own weight, a fixed section (3c) positioned around the periphery, and elastic support sections (3d) which join the vibration film (3b) to the fixed section (3c).

L'invention concerne un détecteur de vibration capable de produire une variation de capacité entre une électrode fixe et une électrode de vibration (3) opposée à l'électrode fixe, sous la forme d'un signal de vibration, détecteur caractérisé en ce que l'électrode de vibration (3) est réalisée sous la forme d'un même élément plat présentant des fentes (3a), un film vibrant (3b) dans la partie médiane, effectuant une déplacement de vibration uniquement par son propre poids, une section fixe (3c) positionnée sur la périphérie, et des sections supports élastiques (3d) reliant le film vibrant (3b) à la section fixe (3c).

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