Vibratory digital integrating accelerometer

Details Vibratory digital integrating accelerometer Vibratory digital integrating accelerometer

G - Physics

01

P

73/42

G01P 15/02 (2006.01) G01C 19/56 (2006.01) G01P 15/08 (2006.01) G01P 15/097 (2006.01) G01P 15/10 (2006.01)

Patent

CA 1281203

ABSTRACT An accelerometer transducer has a base holding a sheet normal to an input axis. The sheet is suspended from the base by a first spring arrangement for oscillatory motion in the way of limited angular excursions about a central axis lying in the sheet. A weight is spring-suspended from the sheet in a manner permitting displacement of the center of gravity of the weight along the input axis. Acceleration along the input axis varies the moment of inertia of the assembly consisting of the sheet and the weight about the central axis, altering the frequency of oscillatory motion by an amount functionally related to the magnitude of the acceleration. Means are provided to drive the sheet at its characteristic frequency and to measure its frequency of oscillation. In a preferred embodiment, a first transducer includes a weight suspended offset from the sheet in a first direction along the input axis, and a second transducer includes a weight offset from the sheet in the opposite direction along the input axis. The change of oscillatory frequency of the second transducer is subtracted from that of the first transducer to develop an output quantity linearly related to the acceleration. In a preferred embodiment, the sheets, springs and weights are micromechanical devices fabricated by semiconductor fabrication techniques. Electrostatic driving means for driving the sheet, and the capacitive pick-off means for sensing its vibration are also shown.

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