Viewing and measuring apparatus

Details Viewing and measuring apparatus Viewing and measuring apparatus

G - Physics

01

B

33/49

G01B 9/02 (2006.01) G01B 11/00 (2006.01) G01B 11/02 (2006.01)

Patent

CA 1141946

TITLE VIEWING AND MEASURING APPARATUS INVENTOR James R. Pekelsky ABSTRACT OF THE DISCLOSURE An apparatus for viewing and measuring using a partially reflective grating superimposed with the object. The invention provides efficient separation of viewing and measurement spectra from a common axis for a clear view of the object in conjunction with an accurate interferometric measuring system.

384422

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