C - Chemistry – Metallurgy – 07 – F
Patent
C - Chemistry, Metallurgy
07
F
260/430.5, 260/4
C07F 3/02 (2006.01) C07F 3/00 (2006.01) C07F 3/06 (2006.01) C23C 16/18 (2006.01)
Patent
CA 1234822
Abstract of the Disclosure Novel adducts of magnesium and zinc .beta.-diketonates with the bidentate ether 1,2-dimethoxyethane are disclosed which exhibit high vapor pressures upon moderate heating, and improved resistance to thermal decomposition at vaporization temperatures. Volatile metal complexes are of interest for a variety of appli- cations including fuel additives, metal vapor sources, and gas transport reagents. Complexes provided in accordance with the invention have the molecular formula: M(hfa)2?1,2-DME wherein M is Zn or Mg, and wherein 1,2- DME represents a single 1,2-dimsthoxyethane ligand form- ing a 1:1 adduct with the M(hfa)2 molecule. These adducts exhibit not only higher thermal stability than many of theknownadducts, but also a high volaeility and lower melting temperature. Such characteristics sig- nificantly increase the utility of these complexes as source materials for chemical vapor deposition reactions.
489425
Fay Robert C.
Thompson David A.
Corning Glass Works
Gowling Lafleur Henderson Llp
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